The application of spectroscopic EUV reflectometry for characterizing the latent image of a line grating is investigated. Numerical simulations with JCMsuite are performed to compute the reflectance of latent images of line gratings and simulations to analyze latent image gratings with a surface topography.
S. Schröder, et al. Latent image characterization by spectroscopic reflectometry in the extreme ultraviolet. J Micro Nanolithogr MEMS MOEMS, 21, 021208-021208 (2022).