Element sensitive reconstruction of nanostructured surfaces with finite elements and grazing incidence soft X-ray fluorescence

The geometry of lamellar gratings is investigated experimentally with reference-free grazing-incidence X-ray fluorescence analysis. The demonstrated combination of GIXRF and finite-element simulations paves the way for a versatile characterization of nanoscale-structured surfaces.

V. Soltwisch, et al. Element sensitive reconstruction of nanostructured surfaces with finite elements and grazing incidence soft X-ray fluorescence. Nanoscale 10, 6177 (2018).

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