The geometry of lamellar gratings is investigated experimentally with reference-free grazing-incidence X-ray fluorescence analysis. The demonstrated combination of GIXRF and finite-element simulations paves the way for a versatile characterization of nanoscale-structured surfaces.
V. Soltwisch, et al. Element sensitive reconstruction of nanostructured surfaces with finite elements and grazing incidence soft X-ray fluorescence. Nanoscale 10, 6177 (2018).