Investigating surface structures by EUV scattering

An exploration of soft X-ray and EUV-scatterometry from grazing to near normal incidence is presented. Measurements are performed on e-beam written silicon gratings. The reconstructed geometrical line shape models are statistically validated by applying a Markov-Chain Monte Carlo sampling technique. Experimental data and simulation results provide insight into the potential of EUV scatterometry.

V. Soltwisch, et al. Investigating surface structures by EUV scattering. Proc. SPIE 10143, 101430P (2017).



We use cookies on our website. Some of them are essential for the operation of the site, while others help us to improve this site and the user experience (tracking cookies). You can decide for yourself whether you want to allow cookies or not. Please note that if you reject them, you may not be able to use all the functionalities of the site.