Quantifying parameter uncertainties in optical scatterometry using Bayesian inversion

A Newton-like method is presented to solve inverse problems and to quantify parameter uncertainties. FEM, including direct computation of partial derivatives, is used to solve the forward-problem.

M. Hammerschmidt, et al. Quantifying parameter uncertainties in optical scatterometry using Bayesian inversion. Proc. SPIE 10330, 1033004 (2017).

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