The goal of the project is the development of a software toolbox for convenient numerical investigations regarding uncertainty quantication. Through the use of innovative numerical methods such as of the polynomial chaos method, the dependency between the simulation results and the uncertainties of the system can be investigated and efficiently quantified. On the one hand, the methods provide valuable information for the optimization of optical components and measurement method. On the other hand, the methods can be used to determine the results of indirect measurement methods such as of scatterometry can be evaluated faster and more accurately.
Physikalisch Technische Bundesanstalt, Berlin, Germany
JCMwave GmbH, Berlin, Germany
Federal Ministry for Economic Affairs and Energy on a basis of a decision by the German Bundestag.